Output Gas Purity≥ 99.9999% (max output capacity 1 ~ 200 Nm³/h; higher flow rates customizable)
Feed Gas RequirementsStandard pure argon purity ≥ 99.9%; allowable impurities: O₂ < 200 ppm, N₂ < 200 ppm, H₂O < 1000 ppm (dew point < -20℃)
Residual O₂ / N₂O₂ ≤ 0.2 ppm; N₂ ≤ 0.2 ppm
Other Output ImpuritiesH₂O ≤ 1 ppm (dew point ≤ -76℃); CO + CO₂ ≤ 0.1 ppm; sulfur oxides ≤ 0.1 ppm
Particulate ControlSolid particles ≥ 0.3 μm ≤ 3 ~ 5 counts/L (electronic grade)
Operating Pressure / Temp.0 ~ 1.0 MPa; working towers at ambient temperature, regeneration temp. 350~380℃
N₂-Removal Temp. / Regen Gas500 ~ 700℃ / argon consumption for regeneration: 0.6 L/min
Power Supply & Regen PowerAC 220V, 2.4 kW during regeneration
Dimensions / Weight470 × 660 × 1220 mm / 110 kg