Applicable GasesN₂ (Nitrogen) / H₂ (Hydrogen) / Ar (Argon) / He (Helium) / Air (dedicated column media per gas)
Standard Flow Ratings5 / 10 / 20 / 30 / 50 L/min (1~50 L/min and custom higher flow rates available)
Feed Gas RequirementsPurity > 99.9%; O₂ < 500 ppm, H₂O < 500 ppm
Max Operating Pressure≤ 10 MPa (multiple pressure ratings available)
Output Gas PurityPurity > 99.9999%; O₂ ≤ 0.5 ppm; H₂O ≤ 1 ppm (dew point ≤ -76℃); CO + CO₂ ≤ 0.1 ppm; particulates (≥ 0.3 μm) 3 ~ 5 counts/L