FX-Z Multi-Zone
01 / 02
FX-Z Series Inert Gas Purifier (Five-Zone Precision Temperature Control Panel)
Inert Gas Purifier CZA-4N / FX-Z
Covers the full spectrum of inert gases—Ar / He / Ne / Kr / Xe—with dedicated getters to deeply remove impurities down to sub-ppm levels.
Technical Specifications
Applicable Gases
Ar (Argon), He (Helium), Ne (Neon), Kr (Krypton), Xe (Xenon)
Feed Gas Requirements (Ar, He)
Purity ≥ 99.9% (standard cylinder pure argon, liquid argon, cylinder helium); allowable impurities O₂ < 200 ppm, H₂O < 1000 ppm, N₂ < 200 ppm
Output Gas Specifications
Purity ≥ 99.9999%; residual O₂ ≤ 0.2 ppm, H₂O ≤ 1 ppm (dew point ≤ -76 °C), N₂ ≤ 0.2 ppm, CO + CO₂ ≤ 0.1 ppm, particulates (≥ 0.3 μm) 3 ~ 5 particles/L
Operating Pressure / Flow
0 ~ 1.0 MPa / 1 ~ 200 Nm³/h (customizable to user specifications)
Model Series
CZA-4NSemi-auto · Dedicated to argon, dual-tower pre-purification + deep N₂ removal
FX-ZSemi-auto · Custom getter purification selectable for Ar, He, Xe, Ne, or Kr
