Applicable GasesAr (Argon), N₂ (Nitrogen), H₂ (Hydrogen), O₂ (Oxygen)
Allowable Feed ImpuritiesO₂ ≤ 1000 ppm, H₂O ≤ 1000 ppm
Output Gas Purity≥ 99.9998%
Output Residual O₂ / H₂OO₂ ≤ 0.5 ppm; H₂O ≤ 2 ppm (dew point ≤ -72 °C)
Other Output ImpuritiesCO + CO₂ ≤ 0.1 ppm; S & P oxides ≤ 0.1 ppm
Particulate ControlSolid particles ≥ 0.3 μm: 3 ~ 5 particles/L
Operating Pressure Range0.1 ~ 1.0 MPa
Rated Flow Capacity1 ~ 200 Nm³/h (customizable to customer operating conditions)