XZ / CZH Series Recirculating Regenerative Purifier (closed-loop chamber exhaust purification and recovery)
Recirculating Regenerative Purifier XZ / CZH Series
Purifies and recirculates exhaust gas from sealed chambers directly back into service, enabling closed-loop reuse of high-value gases such as He, Ne, Kr, and Xe and saving over 80% in gas costs.
Technical Specifications
Applicable Gases
Ar (Argon), N₂ (Nitrogen), He (Helium), H₂ (Hydrogen), O₂ (Oxygen), Ne (Neon), Xe (Xenon), Kr (Krypton)
Feed Gas Requirements
Purity ≥ 99.9%; allowable impurities: hydrocarbons ≤ 60 ppm, H₂ ≤ 1000 ppm or O₂ ≤ 1000 ppm, H₂O ≤ 1000 ppm
Recirculated Product Gas
Purity ≥ 99.9998%; residual O₂ ≤ 1 ppm, H₂O ≤ 2 ppm (dew point ≤ -72℃), particulates (≥ 0.3 μm) 3~5 counts/L
Operating Pressure / Flow Rate
0 ~ 1.0 MPa / 1 ~ 500 Nm³/h (customized to sealed chamber volume and air-exchange rate)
Model Lineup
CZH-CSemi-Automatic Recirculating Type
CZH-ZFully Automatic Recirculating Type
